Definition of LPCVD. Meaning of LPCVD. Synonyms of LPCVD

- Atmospheric pressure CVD (APCVD) – CVD at atmospheric pressure. Low-pressure CVD (LPCVD) – CVD at sub-atmospheric pressures. Reduced pressures tend to reduce unwanted...
- Silicon film is synthesized by low-pressure chemical vapor deposition (LPCVD) to minimize surface roughness. First, amorphous silicon is deposited at...
- and batch low pressure CVD (LPCVD). ASM provides single-wafer PECVD processes on the Dragon XP8 tool. ASM provides batch LPCVD/diffusion processes on the...
- the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration...
- technologies it is deposited using low-pressure chemical-vapour deposition (LPCVD) reactors at high temperatures and is usually heavily doped n-type or p-type...
- diode array. So with the help of a workmate who had invented low pressure (LPCVD) polysilicon deposition at Motorola a few years earlier a low pressure silicon...
- The latter has several variants: low-pressure chemical vapor deposition (LPCVD), plasma-enhanced chemical vapor deposition (PECVD), and plasma-****isted...
- Common masking materials for long etches in TMAH include silicon dioxide (LPCVD and thermal) and silicon nitride. Silicon nitride has a negligible etch...
- Hazards Formation of silicon oxide layers in the semiconductor industry. LPCVD and PECVD method in comparison. Stress prevention. Quartz (SiO2) piezoelectric...
- substrates, two methods are used: Low pressure chemical vapor deposition (LPCVD) technology, which works at rather high temperature and is done either in...