-
systems Bulk
micromachining Surface micromachining High-aspect-ratio
microstructure technologies High
aspect ratio (HAR)
silicon micromachining This disambiguation...
- bulk
micromachining with comb
structures and in-plane
operation typical of
surface micromachining.
While it is
common in
surface micromachining to have...
- is
usually done by two techniques,
surface micromachining and bulk
micromachining. To do bulk
micromachining, the
region needed is
highly doped with boron...
- Bulk
micromachining is a
process used to
produce micromachinery or
microelectromechanical systems (MEMS).
Unlike surface micromachining,
which uses a succession...
-
Surface micromachining builds microstructures by
deposition and
etching structural layers over a substrate. This is
different from Bulk
micromachining, in...
- due to
change in capacitance.
CMUTs are
constructed on
silicon using micromachining techniques. A
cavity is
formed in a
silicon substrate, and a thin layer...
-
example is the
Chapman strut, a
suspension linkage.
During surface micromachining,
stiction or
adhesion between the
substrate (usually silicon-based)...
- in the
production of
semiconductor integrated circuits, eye surgery,
micromachining, and
scientific research. "Excimer" is
short for "excited dimer", while...
-
semiconductor based integrated circuits or "chips", eye surgery, and
micromachining.
Since the 1960s,
excimer lasers have been
widely used in high-resolution...
-
PowerMEMS 2008 and MicroEMS2008: 249–251. Ruby, R.; Merchant, P. (1994). "
Micromachined thin film bulk
acoustic resonators". IEEE
International Frequency Control...
